• Temperature range:
  • from 5-150^oC/100-300^oF
  (for manual valve)
  • from 5-60^oC/100-140^oF
  (for pneumatic valve)
• Seal: FKM (Flouro Rubber)
• Clamp Fastened
• Leakrate, ext. 1.3x10^-10 mbar I/s
• Leakrate, int. 1.3x10^-9 mbar I/s

• Pressure range: 1x10^-8mbar to 1 bar (abs.)
• Cycles to first maintenance:
• Manual: 100,000
• Pneum.: 2,000,000
• Installation: any
• Position indicator (only for pneumatical valve): prepared
• Standard: normally closed

• Temperature range: 5-150^oC/100-300^oF
• Seal: FKM (Flouro Rubber)
• Passage: bellow 316L SS
• Leakrate, ext. 1.3x10^-10 mbar I/s
• Leakrate, int. 1.3x10^-9 mbar I/s
• Cycles to first maintenance: 2,000,000

• Pressure range: 1x10^-8mbar to 1 bar (abs.)
• Position indicator: prepared for both options normally closed/normally open
• Standard: normally closed
• Installation: any

• The soft pump pump valves have a needle integrated into the head. This needlw can be opened pneumatically to avoid an abrupt pressure relief. In this picture you can see the setscrew in the head of the valve and both cintrol inputs.

• Soft start up
• Needle valve adjustable by a setscrew
• Compact construction
• Installation: any
• Temperature range: 5-50^oC/40-120^oF
• Inclusive control valve 24 V DC

• Elecrical Connection: 24 Volt DC, the integrated power supply control avoids overheating while the inductor is open Switching capacity 45W (35W) or 0.2 sec for ISO-KF NW 25 (ISO-KF NW 16) holding capacity 75W (65W). Due to a delay of switching capacity of some valves, please connect directly to a 24V DC electric ciruit.
• Standard: normally closed

• Temperature Range: 5-40^o40-100^oF
• Seal: FKM
• Passage: Bellow 316L
• Leakrate, ext.: 1.3x10^-10 mbar I/s
• Leakrate, int.: 1.3x10^-7 mbar I/s
• Pressure range: 1x10^-8 mbar to 1 bar (abs.)
• Cycles to first maintenance: 500,000
• Installation: any

• Temperature range (manual): 5-150^oC/40-300^oF
• Passage: bellow 316L SS
• Leakrate, ext.: 1.3x10^-10 mbar I/s
• Leakrate, int.: 1.3x10^-9 mbar I/s
• Pressure range: 1x10^-8 mbar to 1 bar (abs.)

• Cycles to first maintenance: 2,000,000
• Installation: any
• Position indicator: prepared
• Standard: normally closed
• Seal: FKM

• Passage: stainless steel bellow
• Leakrate, ext.: 1.3x10^-9 mbar I/s
• Leakrate, int.: 1.3x10^-8 mbar I/s
• Pressure range: 1x10^-8 mbar to 1 bar (abs.)

• Cycles to first maintenance: 50,000
• Installation: any
• Standard: normally closed
• Seal: FKM

• Passage: stainless steel bellow
• Leakrate, ext.: 1.3x10^-9 mbar I/s
• Leakrate, int.: 1.3x10^-8 mbar I/s
• Pressure range: 1x10^-8 mbar to 1 bar (abs.)
• Control valves: -V-SS-16-25-24DC-V-SS-16-25-230VAC

• Cycles to first maintenance: 50,000
• Installation: any
• Standard: normally closed
• Seal: FKM

• Passage: stainless steel bellow
• Leakrate, ext.: 1.3x10^-9 mbar I/s
• Leakrate, int.: 1.3x10^-8 mbar I/s
• Pressure range: 1x10^-6 mbar to 1 bar (abs.)
• Cycles to first maintenance: 1,000,000

• Temperature range XYH: 5-150^oC/40-300^oF
• Temperature range XYA: 5-60^oC/40-140^oF
• Installation: any
• Standard: normally closed
• Seal: FKM

• Passage: stainless steel bellow
• Leakrate, ext.: 1.3x10^-9 mbar I/s
• Leakrate, int.: 1.3x10^-8 mbar I/s
• Pressure range: 1x10^-8 mbar to 1 bar (abs.)
• Cycles to first maintenance: 50,000

• Installation: any
• Standard: normally closed
• Seal: FKM
• Conductance:
• 16KF: 5,5 I/s
• 25KF: 13,0 I/S
• 40KF: 40,5 I/S

• Passage: stainless steel bellow
• Leakrate, ext.: 1.3x10^-9 mbar I/s
• Leakrate, int.: 1.3x10^-8 mbar I/s
• Pressure range: 1x10^-6 mbar to 3 bar (abs.)
• Cycles to first maintenance: 1,000,000

• Installation: any
• Standard: normally closed
• Seal: FKM
• Conductance:
• 16KF: 5,5 I/s
• 25KF: 13,0 I/S
• 40KF: 40,5 I/S

HV gate valve

more info

• Actuating mechanic sealed by a metal bellow
• Actuated manually or pneumatically
• Bakeable to 150^oC/300^oF

• Position marker and pneumatic control valve available on request
• Gate sealed by Viton
• OFHC copper sealed at body separation

• The slit valve has a retangular opening especially suited for wafer transfer. The unique "L-Motion" eliminates abrasion by lifting the gate prior to applying pressure to the sealing surface.
• Control Pressure: 4.5 bar

• Seal: FKM
• Internal Leakrate: better than 6,5x10^-10 mbar I/s
• Pressure range: 1x10^-7 mbar-2 bar (abs.)
• Cycles: 2,000,000
• Installation: any

• Seal: disc Viton/head Viton
• Passage: gate type passage
• Leaktightness: lt; 1x10^-9 mbar I/s
• Pressure range: 1x10^-7 mbar to 2 bar (abs.)
• Differential pressure at the valve disc:
• lt; 2 bar in both directions
• lt; 1.2 bar in opening direction (DN100-160)

• Differentail pressure during opening: 30 mbar in both directions
• Service life until first maintenance: 50,000 cycles
• compressed air, pneumatic: 4.5 to 7 bar
• Installation: any

• Two way ball valve

• Manually operated

• Two way ball valve

• Pneumatically operated

• Three way ball valve

• Manually operated

• Seal: teflon
• Leaktightness: better than 1x10^-6 mbar I/s
• Pressure range: 1x10^-4 mbar to 10 bar (abs.)
• Service live until first maintenance: 20,000 cycles

• Passage: free passage
• Installation: any
• Temperature range:-20-80^oC/-5-180^oF of the medium
• Pneumatic pressure: 6-8 bar, double acting

• These ball valves are designed for heave duty industrial applications, for an easy maintenace and longer service.
• In comparison to gate valves, ball valves can get over higer differential pressures.
• When ordering the pneumatically actuated valve, please indicate whether it is needed in "normally open" or "normally closed".

• Bakeable to 150^oC/300^oF
• Installation: any
• Leakrate: 10^-9 mbar I/s
• Stem seal: Viton
• Valve seal: Teflon
• Allowable differential pressure: 3bar
• Compressed air supply with 4.5 to 7bar
• Material 316 L SS/1.4404

• These electromagnetic actuated valves fit for small installations of conduction in vacuum.
• Leakrate int.: better than 10^-9 mbar I/s

• Temperature range: 5-40^oC/40-100^oF
• Installation: any
• Closure: normally closed

• This pneumatically actuated valve belongs to the "soft-pump" class valves which have two valve stems aligned in one axis, one large, one small. One stem has the diameter of a needle valve, the othe covers the entire valve diameter. The needle valve can be adjusted in stroke and the air in-take controlled.

• Leakrate int.: better than 5x10^-9 mbar I/s
• Temperature range: 5-60^oC/40-160^oF
• Installation: any
• Closure: normally closed

• Pressure range: 1x10^-7 mber to 5bar
• Materials: aluminum/viton/plastic
• Cycles to first maintenance: 100,000
• Average conductancy
• Closure: normally closed

• Leakrate int.: better than 5x10^-9 mbar I/s
• Temperature to 100^oC/210^oF of the medium, 50^oC/120^oF on the hand wheel
• Installation: any

• Service life: 3,000 cycles
• Temperature range: -30 to 130^oC/-20 to 260^oF
• Installation: any

• Leakrate: 1x10^-9 mbar I/s
• Pressure range: 10^-8 to 2500 mbar

• Space saving unit
• "Open" to "Closed" in 1.25 sec.

• Multifunctional and intelligent valve controlling

• Controlled, cleaned backflow of the medium
• Particle filer to 0.003 (181)m
• 100,000 cycles to replacement
• Easy to assemble

• Feed of external gas by VCR fitting
• Nickel Sinter metal
• Disk or rod design available

• Pressure relief operation mode the switching pressure can be set via clip. Please do not use for security relevant applications! The exact switching pressure can vary more than +/- 50 mbar.
• Seal: Viton

• Leakrate: better than 1x10^-7 mabar I/s
• Reccomended installation: vertical
• Working temperature up to 60^oC/140^oF

• The burst disc displodes at an overpressure between 0 to 1.7 bar. The unit has to be replaced after rupture.

• Leakrate: better than 1x10^-10 mabar I/s
• On a CF 16 flange
• Burst pressure: 1.7 bar/25 PSI